0000000000010294
AUTHOR
Stefan De Gendt
Growth and characterization of horizontally suspended CNTs across TiN electrode gaps.
A technique is proposed to grow horizontal carbon nanotubes (CNTs) bridging metal electrodes and to assess their electrical properties. A test structure was utilized that allows for selective electrochemical sidewall catalyst placement. The selectivity of the technique is based on the connection of the desired metal electrodes to the silicon substrate where the potential for electrochemical deposition was applied. Control over the Ni catalyst size (15-30 nm) and density (up to 3 x 10(11) particles cm(-2)) is demonstrated. Horizontal CNTs with controlled diameter and density were obtained by CVD growth perpendicular to the sidewalls of patterned TiN electrode structures. Electrode gaps with …
Growth and Electrical Characterization of Horizontally Aligned CNTs
Nickel catalyst nanoparticles acting as nucleating seeds for carbon nanotube (CNT) growth were selectively deposited on the sidewalls of titanium nitride (TiN) electrodes by electrochemical deposition (ECD) from a Ni2+ electrolyte solution. Horizontal aligned CNTs were grown selectively from the sidewalls of these TiN electrodes forming a bridging CNT contact between the electrode gaps. Current-voltage measurements demonstrated this could be a promising technique towards nanoscale interconnections and nanoelectronic devices with resistance values for the bridging CNTs as low as 300Ω.