Electrostatically operated micromirrors for a Hadamard transform spectrometer

The paper presents the development of a linear micromirror array which can be used as a switchable entrance mask for a double-array Hadamard transform spectrometer. In addition to the detector array the double-array spectrometer has a linear multi-slit array realised by independently switchable micromirrors at the entrance side. Two different switch positions of the electrostatically operated mirrors allow the reflection of light into or away from the spectrometer. With this arrangement (mirror array, concave grating and array detector) and the use of the Hadamard transform principle it is possible to increase the signal-to-noise ratio and the resolution of the system compared to convention…