Tailoring the Structural, Optical, and Photoluminescence Properties of Porous Silicon/TiO2 Nanostructures

The structural, optical, and photoluminescence properties of porous silicon (PSi)/titanium dioxide (TiO2) nanostructures were investigated. PSi structures consisting of macro- and mesoporous layers were fabricated by metal-assisted chemical etching, and then TiO2 was introduced inside the PSi matrix using the atomic layer deposition technique. We performed scanning electron microscopy, transmission electron microscopy (TEM), X-ray diffraction, energy dispersive X-ray spectroscopy, Raman spectroscopy, ellipsometry, and photoluminescence (PL) spectroscopy to characterize the prepared and annealed PSi/TiO2 nanostructures. TEM and Raman analyses revealed that TiO2 had a crystalline anatase stru…