Tailoring the Structural, Optical, and Photoluminescence Properties of Porous Silicon/TiO2 Nanostructures
The structural, optical, and photoluminescence properties of porous silicon (PSi)/titanium dioxide (TiO2) nanostructures were investigated. PSi structures consisting of macro- and mesoporous layers were fabricated by metal-assisted chemical etching, and then TiO2 was introduced inside the PSi matrix using the atomic layer deposition technique. We performed scanning electron microscopy, transmission electron microscopy (TEM), X-ray diffraction, energy dispersive X-ray spectroscopy, Raman spectroscopy, ellipsometry, and photoluminescence (PL) spectroscopy to characterize the prepared and annealed PSi/TiO2 nanostructures. TEM and Raman analyses revealed that TiO2 had a crystalline anatase stru…
Study on Structural, Mechanical, and Optical Properties of Al2O3–TiO2 Nanolaminates Prepared by Atomic Layer Deposition
Structural, optical, and mechanical properties of Al2O3/TiO2 nanolaminates fabricated by atomic layer deposition (ALD) were investigated. We performed transmission electron microscopy (TEM), X-ray diffraction (XRD), X-ray reflectivity (XRR), energy dispersive X-ray spectroscopy (EDX), ellipsometry, UV–vis spectroscopy, photoluminescence (PL) spectroscopy, and nanointendation to characterize the Al2O3/TiO2 nanolaminates. The main structural, optical, and mechanical parameters of Al2O3/TiO2 nanolaminates (thickness, grain size, refractive index, extinction coefficient, band gap, hardness, and Young’s module) were calculated. It was established that with decreasing of the layer thickness, the …
Structural and optical properties of TiO2–Al2O3nanolaminates produced by atomic layer deposition
Structural and optical properties of Al2O3/TiO2 nanolaminates fabricated by atomic layer deposition (ALD) were investigated. We performed Raman spectroscopy, transmission electron microscopy (TEM), X-Ray reflectivity (XRR), UV-Vis spectroscopy, and photoluminescence (PL) spectroscopy to characterize the Al2O3/TiO2 nanolaminates. The main structural and optical parameters of Al2O3/TiO2 nanolaminates were calculated. It was established that with decreasing of the layer thickness, the value of band gap energy increases due to the quantum size effect related to the reduction of the nanograins size. It was also shown that there is an interdiffusion layer at the Al2O3/TiO2 interface which plays a…