0000000000416927
AUTHOR
N.f. Vershinin
Vacuum arc deposition of protective layers on glass and polymer substrates
Abstract Vacuum arc deposition allows one to deposit various coatings on insulating and temperature-sensitive substrates (like polymers). An advantage of the vacuum arc deposition technique is the low substrate temperature during the deposition process. A vacuum arc deposition apparatus for the coating of large-area substrates has been developed. Ti, TiN, TiO 2 and diamond-like single and multilayer coatings have been deposited on plastic and glass substrates. The vacuum arc technology permits formation of multilayer colour filters of high uniformity on substrates with dimensions up to 2000×1400 mm 2 . The microstructure, chemical composition and optical properties of the deposited coatings…
Corrosion resistance of the vacuum arc deposited Ti, TiN and TiO2 coatings on large area glass substrates
An industrial installation for vacuum arc deposition is presented. Its potential in the field of decorative coatings for large area glass sheets is demonstrated. In particular it is possible to deposit patterned coatings through a polymeric textile mask. The ability to deposit uniform multilayer coatings having interference colours onto large silicate glass sheets is shown. Titanium, titanium nitride and titanium dioxide coatings on silicate glass have been characterized in terms of composition and corrosion resistance. Depth profiling was achieved with the aid of Auger electron spectroscopy. The corrosion resistance of TiN coatings is higher than that of TiO 2 . The corrosion resistance of…