Implementing the 3-omega technique for thermal conductivity measurements

2013

Thermal conductivity of the constituent materials is one of the most important properties affecting the performance of micro- and nanofabricated devices. These devices often make use of thin films with thicknesses ranging from some nanometers to few micrometers. The thermal conductivity of thin films can be measured with the three-omega method. In three-omega technique a metal wire acting as a resistive heater is microfabricated on the sample. Alternating current passing through the metal heater at a frequency ω heats the sample periodically and generates oscillations in the resistance of the metal line at a frequency 2ω. The oscillating resistance component is coupled with the driving curr…