0000000000681956
AUTHOR
N. Chaoui
In situ diagnostics and control of laser-induced removal of iron oxide layers
The mechanism of laser-induced removal of thermally grown iron oxide layers on pure iron has been investigated by means of in situ reflectivity measurements. The experiments were carried out by irradiating the sample with λ=584 nm, τ=6 ns (FWHM) laser pulses in a buffer borate solution after a cathodic polarisation of - 1.5 V/SCE had been applied during 40 min. The removal efficiency has been studied as a function of the number of laser pulses, for several fluence values and for a few time delays after switching off the cathodic polarisation. The results demonstrate that reflectivity measurements are a suitable non-invasive in situ diagnostics tool for the assessment of the efficiency of ox…
Laser assisted particle removal from Silicon wafers
We have studied the removal of submicrometer particles from silicon wafers by the steam laser cleaning (SLC) and dry laser cleaning (DLC) processes. These processes are currently being investigated as new promising cleaning technologies for complementing traditional methods in industrial applications. For SLC a thin liquid layer (e.g. a water-alcohol mixture) is condensed onto the substrate, and is subsequently evaporated by irradiating the surface with a short laser pulse. The DLC process, on the other hand, relies only on the laser pulse, without application of a vapor jet. Using well-characterized monodisperse polystyrene and silica particles as well as irregularly shaped alumina particl…