A Stochastic Algorithm Based on Fast Marching for Automatic Capacitance Extraction in Non-Manhattan Geometries

WOS:000346854900026 (Nº de Acesso Web of Science) We present an algorithm for two- and three-dimensional capacitance analysis on multidielectric integrated circuits of arbitrary geometry. Our algorithm is stochastic in nature and as such fully parallelizable. It is intended to extract capacitance entries directly from a pixelized representation of the integrated circuit (IC), which can be produced from a scanning electron microscopy image. Preprocessing and monitoring of the capacitance calculation are kept to a minimum, thanks to the use of distance maps automatically generated with a fast marching technique. Numerical validation of the algorithm shows that the systematic error of the algo…