Deposition and characterization of cold sprayed nanocrystalline NiTi

International audience; Binary 50Ni–50Ti mixture was prepared by mechanical alloying from elemental powders. After 48 h of milling, the nanocrystalline B2-NiTi powder was produced. Then, this as-milled powder was deposited by cold spraying in order to produce a target which can be used to create thin films by magnetron sputtering technique. The objective is to improve the electrical characterizations of the NiTi/SiO2/Si M.O.S structures. Themorphology evolution of the powder particles, the phase identification and the alloying evolution process as function of milling time were studied using scanning electron microscopy, X-ray diffraction and transmission electron microscopy. In addition, th…