Fabrication techniques for developing a functional microfluidic glass device suitable for detection in optical spectroscopy system

2012

Microfluidic devices offer the chance to manipulate and analyze fluids including bioassays and chemical reactions. In this study, a method to develop a microfluidic analysis system is proposed for detection of nanotubes by a Raman acquisition setup. Microchannels where fabricated in sodalime glass substrate by MeV ion beam lithography or electron beam lithography and wet etching. Fusion bonding (550 °C) was used to seal the microchannels. As a result a prototype microfluidic device with 1.6 µm deep channel that exhibit efficient sealing and suitable channel geometry was obtained. The microfluidic device was tested in a Raman spectroscopy detection system and the collected spectra showed the…