CO2 laser-induced structure changes in lead zirconate titanate Pb(Zr0.58Ti0.42)O3 sol–gel films

Based on absorption spectra of lanthanum modified lead zirconate titanate Pb0.9La0.1(Zr0.65Ti0.35)O3 (PLZT10/65/35) ferroelectric ceramics an idea of local and selective treatment of lead zirconite titanate Pb(ZrXTi1−X)O3 (PZT) sol–gel film in the multi-layer structure by CO2 laser radiation was formulated. The possibility to obtain PZT perovskite film on the SiO2/Si substrate by irradiation with CO2 laser was shown experimentally. X-ray studies revealed the PZT perovskite structure ratio growth at the expenses of pirochlore structure with an increased power density of laser radiation.