Structural Studies of Titanium Oxide Multilayers

Multilayers of titanium oxide on conductive glasses (silica, covered with indium/tin and tin oxides) were obtained by different methods (from suspension, by sol–gel, by vacuum sputtering). X-ray diffraction and positron annihilation depth-resolved characterization of these samples are presented. The data allow us to determine optimal deposition parameters, in order to obtain the anatase phase, important in practical applications in photoelectrochemical cells.