6533b7cffe1ef96bd1258322

RESEARCH PRODUCT

First Steps of µTAS in Latvia

I. SlaidinšS. SjulzicsAnita Lloyd-spetzHans SundgrenG. StrautmanisFredrik WinquistP. RozukalnsV. EglitisIngemar LundströmJanis KleperisA. LusisP. Misâns

subject

Computer scienceCatalytic metalbusiness.industrySolid-stateMicrotechnologyMicroelectronicsNanotechnologybusinessAmmonia vaporSilicon based

description

Owing to participation of Latvian and Swedish scientists in the field of chemically sensitive FET and MOS structures it was possible to utilize the technological facilities of the Microelectronics enterprise in Latvia in making an integrated smart sensor as a matrix of chemically sensitive FETs by using silicon based microtechnology. Thereby the first steps of µTAS in Latvia are made in the direction of integration of solid state ionic materials with FET and MOS structures to develop new chemically sensitive structures and systems.

yearjournalcountryeditionlanguage
1995-01-01
https://doi.org/10.1007/978-94-011-0161-5_27