6533b7d1fe1ef96bd125d97e

RESEARCH PRODUCT

Strain sensing with sub-micron sized Al-AlOx-Al tunnel junctions

P. J. KoppinenJ. T. LievonenM. AhlskogI. J. Maasilta

subject

Condensed Matter - Mesoscale and Nanoscale PhysicsMesoscale and Nanoscale Physics (cond-mat.mes-hall)technology industry and agricultureFOS: Physical sciences

description

We demonstrate a local strain sensing method for nanostructures based on metallic Al tunnel junctions with AlOx barriers. The junctions were fabricated on top of a thin silicon nitride membrane, which was actuated with an AFM tip attached to a stiff cantilever. A large relative change in the tunneling resistance in response to the applied strain (gauge factor) was observed, up to a value 37. This facilitates local static strain variation measurements down to ~10^{-7}.

yearjournalcountryeditionlanguage
2009-06-23
10.1063/1.3298582http://arxiv.org/abs/0906.4234