Augsti jonizētas pulsējošas plazmas magnetrono izputināšanas procesu izstrāde volframa oksīdu plāno kārtiņu iegūšanai

6533b7d2fe1ef96bd125db9b

RESEARCH PRODUCT

Augsti jonizētas pulsējošas plazmas magnetrono izputināšanas procesu izstrāde volframa oksīdu plāno kārtiņu iegūšanai

subject

elektrohromisms Augsti joniztētas pulsējošas plazmas magnetrons volframa trioksīds Fizika līdzstrāvas magnetrons

description

Elektrohromie materiāli spēj mainīt krāsu, elektrohromajai šūnai pieliekot elektrisko spriegumu. Šī īpašība ir ar plašu pielietojumu klāstu, piemēram, ēku energoefektivitātes uzlabošana, taču tie ir dārgi un daudzās jomās pagaidām ekonomiski neizdevīgi. Volframa trioksīda (WO3) plānās kārtiņas ir viens no visvairāk pētītajiem elektrohromajiem materiāliem. Darba mērķis bija izstrādāt augsti jonizētas pulsējošas plazmas magnetronās izputināšanas (HiPIMS) procesu volframa oksīdu plāno kārtiņu iegūšanai un salīdzināt tās ar plānajām kārtiņām, kas iegūtas ar līdzstrāvas magnetrona izputināšanas (DCMS) metodi. Izputināšanas režīms ietekmē gan izputināšanas ātrumu, gan plāno kāriņu elektrohromās īpašības. Šajā darbā līdzstrāvas režīmā uzputinātajām kārtiņām elektrohromās īpašības ir labākas un uzputināšanas ātrums lielāks, nekā HiPIMS režīmā uzputinātajām kārtiņām.

year	journal	country	edition	language
2015-01-01

https://dspace.lu.lv/dspace/handle/7/28869

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