6533b7d2fe1ef96bd125e711

RESEARCH PRODUCT

Chemical and structural characterization of periodic metal/oxide nanometric layers using STEM-EELS

Valérie PotinArnaud CacucciLuc ImhoffNicolas Martin

subject

[SPI.NANO] Engineering Sciences [physics]/Micro and nanotechnologies/Microelectronics

description

Chemical and structural characterization of periodic metal/oxide nanometric layers using STEM-EELS

https://hal.science/hal-00944586