Structuration of nanometric tungsten/tungsten oxide periodic films combining gas pulsing and glancing angle deposition

6533b7d2fe1ef96bd125f16e

RESEARCH PRODUCT

Structuration of nanometric tungsten/tungsten oxide periodic films combining gas pulsing and glancing angle deposition

Arnaud Cacucci Nicolas Martin Valérie Potin Luc Imhoff

subject

[SPI.NANO] Engineering Sciences [physics]/Micro and nanotechnologies/Microelectronics

description

Structuration of nanometric tungsten/tungsten oxide periodic films combining gas pulsing and glancing angle deposition

year	journal	country	edition	language
2013-01-01

https://hal.science/hal-00944528

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