Fabrication and Characterization of Epitaxial NbN/TaN/NbN Josephson Junctions Grown by Pulsed Laser Ablation

6533b7dcfe1ef96bd1271d01

RESEARCH PRODUCT

Fabrication and Characterization of Epitaxial NbN/TaN/NbN Josephson Junctions Grown by Pulsed Laser Ablation

Kartik Senapati R. C. Budhani Ilari Maasilta M. R. Nevala

subject

Josephson effect Laser ablation Fabrication Materials science business.industry Substrate (electronics)Chemical vapor deposition Condensed Matter Physics Epitaxy Electronic Optical and Magnetic Materials Pulsed laser deposition Rapid single flux quantum Optoelectronics Electrical and Electronic Engineering business

description

We report fabrication and characterization of epitaxial NbN/TaN/NbN Josephson junctions grown by pulsed laser ablation. These SNS junctions can be used as elements of rapid-single-flux-quantum (RSFQ) logic, which is a promising technology for high speed digital electronic devices. The NbN/TaN/NbN trilayer films were prepared on a single crystal MgO substrate by pulsed laser ablation, and patterned into junctions using a novel process utilizing e-beam lithography, chemical vapor deposition and e-beam evaporation. The quality of junctions was tested by measuring the temperature dependence of the junctions' IcRn values, observed to be quite close to theoretical values.

year	journal	country	edition	language
2009-06-01	IEEE Transactions on Applied Superconductivity

https://doi.org/10.1109/tasc.2009.2019030

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