Ar ALD tehnoloģiju uzklātu ZnO nanoslāņu struktūra un optiskās īpašības

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Ar ALD tehnoloģiju uzklātu ZnO nanoslāņu struktūra un optiskās īpašības

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Darbā tiek pētīta struktūra un optiskie parametri četriem cinka oksīda plāno kārtiņu paraugiem ar dažādiem biezumiem. Tie tika iegūti ar ALD (atomic layer deposition) metodi, kas ļauj iegūt konformālas plānās kārtiņas uz praktiski jebkuras pamatnes. Būtiskākie plāno kārtiņu parametri, kas tika noteikti ar dažādām metodēm ir biezums, ķīmiskais sastāvs, caurlaidība un fotoluminescence. Galvenais darba uzdevums ir noteikt saistību starp struktūras un optiskajiem parametriem, kas ļauj turpmāk precīzi zināt, kāda struktūra jāizveido, lai iegūtu vajadzīgās optiskās īpašības.

year	journal	country	edition	language
2013-01-01

https://dspace.lu.lv/dspace/handle/7/25727

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