6533b7dcfe1ef96bd127259e

RESEARCH PRODUCT

Growth of metal/oxide periodic multilayer : relation between structure and electrical behaviour in systems based on titanium and tungsten

subject

description

Periodic multilayers have found many applications in the fields of optics, mechanics or electronics. However, few studies focus on the electrical responses of the metal/oxide periodic structures versus temperature. The interest of this work was focused on the characterization of the multilayers and their electrical properties versus temperature. In TiO/Ti/TiO/TiO2 and WO/W/WO/WO3 systems produced by the reactive gas pulsing process, sample structures were established by transmission electron microscopy for sublayers thicknesses between 1.3 and 50.8 nm. Then, this study highlights a modification of conventional electrical behavior versus temperature. An empirical relationship was established between the electrical resistivity variation and the metal/oxide periodic multilayer structures. The correlation between the operating conditions and the produced structure allows predicting the resistivity of these metal/oxide multilayer structures. Finally, this manuscript paves the way to a new periodic nanostructuration with the combined use of glancing angle deposition and gas reactive pulsing process to produce the first films composed by inclined columns and periodic metal/oxide alternations.