ZnO plāno kārtiņu izgatavošana pie zemām temperatūrām ar reaktīvo magnetrono izputināšanas metodi un to raksturošana

6533b7ddfe1ef96bd12738e2

RESEARCH PRODUCT

ZnO plāno kārtiņu izgatavošana pie zemām temperatūrām ar reaktīvo magnetrono izputināšanas metodi un to raksturošana

subject

Plānās kārtiņas Rentgenstaru difrakcija Infrasarkanā Furjē spektroskopija Cinka oksīds Fizika Magnetronā izputināšanas metode

description

Darbā tika izgatavotas cinka oksīda (ZnO) plānās kārtiņas ar reaktīvo magnetrono izputināšanas metodi pie zemām temperatūrām. Šim nolūkam vakuuma iekārta tika aprīkota ar dzesētāju. Paraugu struktūra tika pētīta ar XRD, FTIR spektroskopiju, tika mērīta gaismas absorbcija. Iegūtie mērījumu dati tika analizēti atkarībā no dažādiem parametriem (temperatūra, kārtiņas biezums, u.c.). Rezultāti tika salīdzināti ar ZnO plānajām kārtiņām, kas izgatavotas bez pamatnes dzesēšanas, kā arī pie paaugstinātas temperatūras. Literatūrā nav viennozīmīgas informācijas par amorfu ZnO plāno kārtiņu īpašībām, kamēr kristāliska ZnO plānās kārtiņas ir plaši izpētītas. Līdz ar to amorfu ZnO kārtiņu izgatavošana ar reaktīvo magnetrono izputināšanas metodi būtu novitāte plāno kārtiņu nozarē, un to iegūšana pavērtu iespējas tālākiem eksperimentālajiem pētījumiem.

year	journal	country	edition	language
2017-01-01

https://dspace.lu.lv/dspace/handle/7/37101

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