Magnetronu uzputināšanas procesu izstrāde p un n tipa caurspīdīgu, elektrovadošu slāņu iegūšanai uz ZnO bāzes

6533b81ffe1ef96bd1277568

RESEARCH PRODUCT

Magnetronu uzputināšanas procesu izstrāde p un n tipa caurspīdīgu, elektrovadošu slāņu iegūšanai uz ZnO bāzes

Mārtiņš Zubkins

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Pārklājumi uz cinka oksīda bāzes ir caurspīdīgi, elektrovadoši materiāli. Visbiežāk lietotais caurspīdīgais, elektrovadošais oksīds (TCO) optiskā elektronikā ir indija alvas oksīds (ITO), kuram strauji pieaug tirgus cena. Ar alumīniju leģēts cinka oksīds (AZO) ir potenciāli labākais ITO aizstājējs, tomēr tas vēl nav sasniedzis ITO raksturīgās īpašības. Papildus problēma optiskās elektronikas attīstībā ir p-tipa TCO trūkums. Darba mērķis bija izpētīt AZO un Zn-Ir-O pārklājumu strukturālās, optiskās un elektriskās īpašības atkarībā no izgatavošanas parametriem. AZO ir n-tipa vadītājs, bet Zn-Ir-O tiek pētīts kā potenciāls p-tipa vadītājs. Pārklājumu iegūšanai tika izmantota reaktīvā līdzstrāvas magnetrona izputināšanas metode. Izgatavošanas parametri ietekmē pārklājumu struktūru, tādējādi ietekmējot gan elektriskās, gan optiskās īpašības.

year	journal	country	edition	language
2013-01-01

https://dspace.lu.lv/dspace/handle/7/21650

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