Optical Plasma Diagnostics During Reactive Magnetron Sputtering

6533b831fe1ef96bd129986c

RESEARCH PRODUCT

Optical Plasma Diagnostics During Reactive Magnetron Sputtering

F. Gaboriau Mireille Gaillard Stephanos Konstantinidis A. Ricard Michel Hecq

subject

Reactive magnetron Materials science [SPI] Engineering Sciences [physics]Sputtering business.industry Optoelectronics Plasma diagnostics Optical emission spectroscopy High-power impulse magnetron sputtering business Glow discharge mass spectroscopy

year	journal	country	edition	language
2008-01-01

https://doi.org/10.1007/978-3-540-76664-3_9

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