6533b852fe1ef96bd12ab63b

RESEARCH PRODUCT

Deposition of indium tin oxide films by laser ablation: Processing and characterization

Mauro MoscaClaudio CaliG. Targia

subject

FabricationMaterials scienceLaser ablationbusiness.industryCondensed Matter PhysicsLaserElectronic Optical and Magnetic Materialslaw.inventionPulsed laser depositionIndium tin oxidelawMaterials ChemistryOptoelectronicsDeposition (phase transition)Electrical and Electronic EngineeringThin filmbusinessTransparent conducting film

description

Abstract In this work an indium tin oxide thin film fabrication technique based on pulsed laser deposition is described and the electrical, optical and mechanical properties of the deposited films are reported. Deposition of high quality films on cold substrates was proved. The third harmonic (355 nm) of an Nd:YAG laser was employed to photoablade the indium tin oxide target.

https://doi.org/10.1016/s0038-1101(98)00084-7