6533b85dfe1ef96bd12bf1e6

RESEARCH PRODUCT

Fabrication of $^{15}\textrm{NV}^{-}$ centers in diamond using a deterministic single ion implanter

Christian OsterkampFerdinand Schmidt-kalerFedor JelezkoKarin Groot-berningGeorg Jacob

subject

PhysicsQuantum PhysicsFabricationSpinsSingle ionCondensed Matter - Mesoscale and Nanoscale Physicsbusiness.industryFOS: Physical sciencesGeneral Physics and AstronomyDiamondQuantum entanglementengineering.materialCondensed Matter - Other Condensed MatterMesoscale and Nanoscale Physics (cond-mat.mes-hall)engineeringOptoelectronicsPhysics::Atomic PhysicsQuantum Physics (quant-ph)businessOther Condensed Matter (cond-mat.other)

description

Nitrogen Vacancy (NV) centers in diamond are a platform for several important quantum technologies, including sensing, communication and elementary quantum processors. In this letter we demonstrate the creation of NV centers by implantation using a deterministic single ion source. For this we sympathetically laser-cool single $^{15}\textrm{N}_2^+$ molecular ions in a Paul trap and extract them at an energy of 5.9\,keV. Subsequently the ions are focused with a lateral resolution of 121(35)\,nm and are implanted into a diamond substrate without any spatial filtering by apertures or masks. After high-temperature annealing, we detect the NV centers in a confocal microscope and determine a conversion efficiency of about 0.6\,$\%$. The $^{15}\textrm{NV}$ centers are characterized by optically detected magnetic resonance (ODMR) on the hyperfine transition and coherence time.

10.1088/1367-2630/ac0753http://arxiv.org/abs/2101.01979