Deposition of Pt and Sn doped CeOx layers on silicon substrate

6533b85ffe1ef96bd12c0fcd

RESEARCH PRODUCT

Deposition of Pt and Sn doped CeOx layers on silicon substrate

Stéphanie Bruyère Iva Matolínová Valérie Potin Vladimír Matolín Mykhailo Vorokhta Arnaud Cacucci

subject

Materials science Silicon Inorganic chemistry Doping chemistry.chemical_element Surfaces and Interfaces General Chemistry Substrate (electronics)Sputter deposition Condensed Matter Physics Surfaces Coatings and Films chemistry Chemical engineering Transmission electron microscopy Materials Chemistry Thin film Tin Platinum

description

Abstract Radio Frequency Magnetron Sputtering is used to elaborate CeO x layers doped with platinum and/or tin on a SiO 2 /Si substrate. Morphology, chemical composition and crystallographic structures were investigated by Transmission Electron Microscopy. The presence of nanoparticles of mainly ceria and metallic platinum is exhibited.

year	journal	country	edition	language
2013-07-01	Surface and Coatings Technology

https://doi.org/10.1016/j.surfcoat.2012.08.036

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