Magnētiskā lauka 3D modelēšana magnetronu izputināšanas sistēmās

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Magnētiskā lauka 3D modelēšana magnetronu izputināšanas sistēmās

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Darbā tiek izstrādāta aprēķinu programma potencFoam pastāvīgo magnētu radītā magnētiskā lauka matemātiskajai modelēšanai trijās dimensijās. Programma izveidota uz atvērtā koda CFD (Computational Fluid Dynamics) bibliotēkas OpenFOAM bāzes. Iegūtie rezultāti salīdzināti ar elektromagnētisku problēmu modelēšanas programmu FEMM (Finite Element Method Magnetics). Ar izstrādāto aprēķinu programmu tiek modelēts magnetronu uzputināšanas sistēmu radītais lauks ar feromagnētisku un paramagnētisku mērķi, veikta rezultātu kvalitatīva analīze saistībā ar mērķa erozijas profila izveidošanos. Atslēgvārdi: matemātiskā modelēšana, OpenFOAM, magnetrons, uzputināšana.

year	journal	country	edition	language
2012-01-01

https://dspace.lu.lv/dspace/handle/7/15182

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