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RESEARCH PRODUCT
Editorial for the Special Issue on Nanofabrication with Focused Electron/Ion Beam Induced Processing
Rosa Córdobasubject
Materials scienceIon beamMechanical EngineeringNanotechnologyElectronFocused ion beamn/aEditorialNanolithographyScience researchControl and Systems EngineeringNano-TJ1-1570Cathode rayMechanical engineering and machineryElectrical and Electronic Engineeringdescription
Focused electron beam (FEB) and focused ion beam (FIB) technologies have opened novel paths for material science research and technology at the micro and nano scales in recent decades [...]
| year | journal | country | edition | language |
|---|---|---|---|---|
| 2021-07-01 | Micromachines |