Influence of flash annealing on structure and electrical properties of multilayered TiO2/TiO/Ti thin films

6533b86ffe1ef96bd12cd8fe

RESEARCH PRODUCT

Influence of flash annealing on structure and electrical properties of multilayered TiO2/TiO/Ti thin films

Arnaud Cacucci Ioannis Tsiaoussis Nicolas Martin Valérie Potin Luc Imhoff

subject

[SPI.NANO] Engineering Sciences [physics]/Micro and nanotechnologies/Microelectronics

description

Influence of flash annealing on structure and electrical properties of multilayered TiO2/TiO/Ti thin films

year	journal	country	edition	language
2013-01-01

https://hal.science/hal-00944557

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