6533b871fe1ef96bd12d19dc
RESEARCH PRODUCT
Sensitivity and mode spectrum of a frequency-output silicon pressure sensor
K.w.h. FouldsMiguel V. AndresM.john Tudorsubject
Atmosphere (unit)SiliconPhysics::Instrumentation and DetectorsChemistryAcousticsGeneral EngineeringMode (statistics)Resonancechemistry.chemical_elementFísicaPressure sensorVibrationQuality (physics)Computer Science::Networking and Internet ArchitecturePhysics::Atomic and Molecular ClustersElectronic engineeringPhysics::Chemical PhysicsSensitivity (electronics)description
The vibrational mode spectrum of a silicon vibrating pressure sensor is investigated. Particular attention is given to the analysis of the vibration shapes, quality factors and relative sensitivity of the resonance frequencies as a function of pressure. It is shown that a pressure sensitivity of a few parts per million at one atmosphere can be achieved. Some comments are also made regarding an improved design of the device.
| year | journal | country | edition | language |
|---|---|---|---|---|
| 1988-12-01 |