Search results for "Cleanroom"

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Integrated Cleanroom Process for the Vapor-Phase Deposition of Large-Area Zeolitic Imidazolate Framework Thin Films

2019

Chemistry of materials XX(XX), acs.chemmater.9b03435 (2019). doi:10.1021/acs.chemmater.9b03435

Materials scienceGeneral Chemical EngineeringQuímica organometàl·licaNanotechnology02 engineering and technologyGeneral ChemistryChemical vapor depositionCiència dels materials540010402 general chemistry021001 nanoscience & nanotechnology01 natural sciences0104 chemical sciencesCleanroomScientific methodddc:540Materials ChemistryDeposition (phase transition)Metal-organic frameworkElectronicsThin filmÒxids0210 nano-technologyZeolitic imidazolate frameworkChemistry of Materials
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