Search results for "RF-PECVD"
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Amorphous hydrogenated carbon (a-C:H) depositions on polyoxymethylene: Substrate influence on the characteristics of the developing coatings
2016
Abstract After oxygen plasma treatment polyoxymethylene (POM) material was exposed to acetylene plasma to progressively deposit two different types of amorphous hydrogenated carbon (a-C:H) films. Radio frequency plasma-enhanced chemical vapor deposition (RF-PECVD) was used to generate both plasma processes. The surface morphology of the coated samples has been investigated by atomic force microscopy (AFM) and their chemical composition by Diffusive Reflectance Infrared Fourier Transform (DRIFT) and Raman spectroscopy. Results revealed the absence of a solid interlayer formation between the a-C:H films and POM. The in sequence exposure of oxygen and acetylene plasma on POM substrate prevents…
Morphological and Chemical Evolution of Gradually Deposited Diamond-Like Carbon Films on Polyethylene Terephthalate: From Subplantation Processes to …
2016
Diamond-like carbon (DLC) films on polyethylene terephthalate (PET) are nowadays intensively studied composites due to their excellent gas barrier properties and biocompatibility. Despite their applicative features being highly explored, the interface properties and structural film evolution of DLC coatings on PET during deposition processes are still sparsely investigated. In this study two different types of DLC films were gradually deposited on PET by radio frequency plasma-enhanced chemical vapor deposition (RF-PECVD) using acetylene plasma. The surface morphology of the deposited samples has been analyzed by atomic force microscopy (AFM). Their chemical composition was investigated by …