Search results for "soft lithography"

showing 4 items of 14 documents

Development of elastomeric lab-on-a-chip devices through Proton Beam Writing (PBW) based fabrication strategies

2009

Abstract In recent years, one of the most exciting developments in fluidic device applications is the rapid evolution of miniaturized micro- and nanofluidic systems, the so called “lab-on-a-chip” devices. These devices integrate laboratory functions into a single chip, and are capable of various biochemical analysis and synthesis, such as sample injection and preparation, single cell/molecule observation, bioparticle sequencing and sorting etc. The evolvement of lab-on-a-chip concept implies the use of novel fabrication techniques for the construction of versatile analytical components in a fast and reproducible manner. Endowed with unique three-dimensional fabrication abilities, Proton Bea…

Nuclear and High Energy PhysicsMaterials scienceFabricationNanotechnologyengineering.materialLab-on-a-chipProton beam writingSoft lithographylaw.inventionCharacterization (materials science)CoatinglawengineeringNanometreFluidicsInstrumentationNuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
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New Developments in Soft Lithography

2003

Abstract The burgeoning area of soft lithography is reviewed with special emphasis on developments within the past three years. Applications in electronics have driven such developments, but more recently, other kinds of device structures and 3D prototyping have also found application, in part, through soft lithography. Microcontact printing (μCP), “lift off” μCP nano transfer printing (nTP), micromolding in capillaries (MIMIC), solvent assisted micromolding (SAMIM), replica molding (REM), and microtransfer molding are the main soft lithography schemes discussed.

Replica moldingMaterials sciencePolymers and PlasticsTransfer printingMicrocontact printingNanotechnologyPhysical and Theoretical ChemistryMicro structureLithographySoft lithographySurfaces Coatings and FilmsJournal of Dispersion Science and Technology
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Influence of MeV H+ ion beam flux on cross-linking and blister formation in PMMA resist

2012

In soft lithography, a pattern is produced in poly(dimethylsiloxane) (PDMS) elastomer by casting from a master mould. The mould can be made of poly(methylmethacrylate) (PMMA) resist by utilising either its positive or negative tone induced by an ion beam. Here we have investigated the irradiation conditions for achieving complete cross-linking and absence of blister formation in PMMA so that its negative characteristic can be used in making master moulds. PMMA thin films approximately 9 µm thick on Si were deposited by spin coating. The 2-MeV H+ ion beam was generated using a 1.7-MV tandem Tandetron accelerator. The beam was collimated to a 500×500 µm2 cross section using programmable proxi…

blister formationlcsh:Tlcsh:Technology (General)soft lithographylcsh:T1-995lcsh:QH+ ion irradiationPMMA resistlcsh:Sciencelcsh:Science (General)lcsh:Technologylcsh:Q1-390Maejo International Journal of Science and Technology
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Patterning of supported gold monolayers via chemical lift-off lithography

2017

The supported monolayer of Au that accompanies alkanethiolate molecules removed by polymer stamps during chemical lift-off lithography is a scarcely studied hybrid material. We show that these Au–alkanethiolate layers on poly(dimethylsiloxane) (PDMS) are transparent, functional, hybrid interfaces that can be patterned over nanometer, micrometer, and millimeter length scales. Unlike other ultrathin Au films and nanoparticles, lifted-off Au–alkanethiolate thin films lack a measurable optical signature. We therefore devised fabrication, characterization, and simulation strategies by which to interrogate the nanoscale structure, chemical functionality, stoichiometry, and spectral signature of t…

two-dimensional materialMaterials scienceta221General Physics and AstronomyNanoparticlesoft lithographyNanotechnology02 engineering and technology010402 general chemistrylcsh:Chemical technology01 natural scienceslcsh:TechnologySoft lithographyFull Research PaperAnalytical ChemistrynanorakenteetmonolayerMonolayernanostructuresNanotechnologyGeneral Materials Sciencelcsh:TP1-1185Electrical and Electronic EngineeringThin filmlcsh:ScienceLithographyNanoscopic scaleta116chemical patterningta114lcsh:TPDMS stamphybrid material021001 nanoscience & nanotechnologylcsh:QC1-9990104 chemical sciencesNanosciencethin filmslcsh:Qohutkalvot0210 nano-technologyHybrid materialOther Chemical Scienceslcsh:PhysicsBeilstein Journal of Nanotechnology
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