Search results for "Électro-décomposition"

Innovative electronic lithography using self-assembly films in order to modify material surfaces at nanometric scale

2013

The concept of electon beam decomposition has been developed in order to create smaller patterns than those achieved by conventional lithographic methods. This work aimed to go further about this concept through a separation of the involved mechanisms in order to better understand them and thus reach a better control of process.A device was designed and a protocol was defined where the first stage is the adsorption at cryogenic temperature of metal-carbonyl compounds. The adsorbate is then decomposed by a focused electron beam and fragmentation residues are removed through annealing allowing the deposit reorganization. The study of the different steps of the elaboration method was followed …