0000000000059941
AUTHOR
C. Legros
Oxygen Diffusion in Alumina. Application to Synthetic and Thermally Grown Al<sub>2</sub>O<sub>3</sub>
S. Chevalier, B. Lesage, C. Legros, G. Borchardt, G. Strehl, M. Kilo Laboratoire de Recherches sur la Reactivite des Solides, CNRS UMR 5613, Universite de Bourgogne, F-21078 Dijon, France Laboratoire d’Etudes des Materiaux Hors Equilibre, CNRS UMR 8647, Universite Paris XI, F-91405 Orsay, France. Institut fur Metallurgie, TU Clausthal, Robert Koch Strasse 42, D38678 Clausthal-Zellerfeld, Germany. * sebastien.chevalier@u-bourgogne.fr
Perovskite thin films grown by direct liquid injection MOCVD
Abstract The continuous scaling down of devices dimensions, in silicon technology, imposes to replace silicon dioxide. Among the potential candidates for new capacitors, some perovskite structure materials (such as titanate or zirconate) show interesting characteristics. The first way to develop perovskite films is to use a mixture of two β-diketonates by varying the solution's cationic ratio. However, our previous results on SrZrO3 showed that a wide parametric study had to be carried on. Another way is to design novel heterometallic precursors that contain both cations on the same molecule. The ligands could be chosen so that peculiar evaporation and decomposition temperatures could be ob…