0000000000134038
AUTHOR
A. Megía-macías
The relationship between visible light emission and species fraction of the hydrogen ion beams extracted from 2.45 GHz microwave discharge.
The relationship between Balmer-α and Fulcher-band emissions with extracted H + , H + 2 , and H + 3 ions is demonstrated for a 2.45 GHz microwave discharge. Ion mass spectra and optical measurements of Balmer-α and Fulcher-band emissions have been obtained with a Wien Filter having an optical viewport on the plasma chamber axis. The beam of approximately 1 mA is analyzed for different plasma conditions simultaneously with the measurement of light emissions both with temporal resolution. The use of visible light emissions as a valuable diagnostic tool for monitoring the species fraction of the extracted beams is proposed. peerReviewed
Experimental evidence of E × B plasma rotation in a 2.45 GHz hydrogen discharge
An experimental observation of a rotating plasma structure in a 2.45 GHz microwave-driven hydrogen discharge is reported. The rotation is presumably produced by E × B drift. The formation of the rotating plasma structure is sensitive to the strength of the off-resonance static magnetic field. The rotation frequency is on the order of 10 kHz and is affected by the neutral gas pressure and applied microwave power.
Ultra-fast intensified frame images from an electron cyclotron resonance hydrogen plasma at 2.45 GHz: some space distributions of visible and monochromatic emissions.
First results from an ultra-fast frame image acquisition diagnostic coupled to a 2.45 GHz microwave hydrogen discharge are presented. The plasma reactor has been modified to include a transparent doubled shielded quartz window allowing to viewing the full plasma volume. Pictures describing the breakdown process at 1μs exposure time have been obtained for integrated visible light signal, Balmer-alpha, Balmer-beta lines, and Fulcher-band. Several different plasma emission distributions are reported. The distribution depends on the magnetic field configuration, incident microwave power, and neutral gas pressure. peerReviewed
Breakdown transient study of plasma distributions in a 2.45 GHz hydrogen discharge
Plasma distribution transients associated with the breakdown of a 2.45 GHz hydrogen discharge similar to high current microwave ion sources are studied by means of an ultra-fast frame image acquisition system in visible light range. Eight different plasma distributions have been studied by photographing the 2D projections of the discharge through a transparent plasma electrode. The temporal evolution of images in Balmer-alpha and Fulcher band wavelengths have been recorded associated to atomic and molecular excitation and ionization processes. Some unexpected plasma distributions transient behaviors during breakdown are reported.
Time resolved measurements of hydrogen ion energy distributions in a pulsed 2.45 GHz microwave plasma
A plasma diagnostic study of the Ion Energy Distribution Functions (IEDFs) of H+, H+2H2+, and H+3H3+ ions in a 2.45 GHz hydrogen plasma reactor called TIPS is presented. The measurements are conducted by using a Plasma Ion Mass Spectrometer with an energy sector and a quadrupole detector from HIDEN Analytical Limited in order to select an ion species and to measure its energy distribution. The reactor is operated in the pulsed mode at 100 Hz with a duty cycle of 10% (1 ms pulse width). The IEDFs of H+, H+2H2+, and H+3H3+ are obtained each 5 μs with 1 μs time resolution throughout the entire pulse. The temporal evolution of the plasma potential and ion temperature of H+ is derived from the d…
Correlations between density distributions, optical spectra, and ion species in a hydrogen plasma (invited)
An experimental study of plasma distributions in a 2.45 GHz hydrogen discharge operated at 100 Hz repetition rate is presented. Ultrafast photography, time integrated visible light emission spectra, time resolved Balmer-alpha emission, time resolved Fulcher Band emission, ion species mass spectra, and time resolved ion species fraction measurements have been implemented as diagnostic tools in a broad range of plasma conditions. Results of plasma distributions and optical emissions correlated with H + , H + 2 , and H + 3 ion currents by using a Wien filter system with optical observation capability are reported. The magnetic field distribution and strength is found as the most critical facto…
Plasma distributions observed in a 2.45 GHz hydrogen discharge
The existence of various spatial distributions of hydrogen plasma in a pulsed 2.45 GHz microwave discharge is demonstrated. The data has been obtained through optical emission diagnostics utilizing an ultra-fast CCD camera system with multi-channel plate (MCP) intensifiers, and a wavelength-filtered photodiode recording temporal light emission signals of hydrogen atoms and molecules. It has been observed that the magnetic field topology and strength are determining the transitions between different plasma patterns and spectral saturation times while neutral gas pressure and microwave power show a weaker influence on the profiles but affect the emitted light intensity.
Experimental study of hydrogen plasma breakdown in a 2.45 GHz microwave discharge
Temporal evolution of microwave-plasma coupling, vacuum ultraviolet (VUV) light emission and plasma electron temperature and density is reported for a 2.45GHz microwave hydrogen discharge pulsed at 50Hz. Directional couplers, a VUV spectrometer and a Langmuir probe are used for the diagnostics of the plasma breakdown. A 5‐10 µs transient peak of light emission exceeding the steady-state intensity by a factor of 3.3 is observed in coincidence with an abrupt drop in the microwave electric field. Observed light emission intensities combined with cross section data indicate that the electron temperature during the breakdown transient exceeds the steady-state value of 4‐6eV by a factor 3, which …