0000000000162142

AUTHOR

Ioannis Tsiaoussis

showing 3 related works from this author

Flash annealing influence on structural and electrical properties of TiO2/TiO/Ti periodic multilayers

2014

Abstract Multilayered structures with a 40 nm period composed of titanium and two different titanium oxides, TiO and TiO 2 , were accurately produced by DC magnetron sputtering using the reactive gas pulsing process. These multilayers were sputtered onto Al 2 O 3 sapphire to avoid substrate compound diffusion during flash annealing (ranging from 350 °C to 550 °C). Structure and composition of these periodic TiO 2 /TiO/Ti stacks were investigated by X-ray diffraction, X-ray photoemission spectroscopy and transmission electronic microscopy techniques. Two crystalline phases α-Ti and fcc-TiO were identified in the metallic-rich sub-layers whereas the oxygen-rich ones were composed of a mixture…

010302 applied physicsMaterials scienceAnnealing (metallurgy)Metals and Alloyschemistry.chemical_element02 engineering and technologySurfaces and InterfacesSputter deposition021001 nanoscience & nanotechnology01 natural sciencesSurfaces Coatings and FilmsElectronic Optical and Magnetic MaterialsAmorphous solidCrystallinitychemistryChemical engineeringRutileElectrical resistivity and conductivity0103 physical sciencesMaterials Chemistry[ SPI.NANO ] Engineering Sciences [physics]/Micro and nanotechnologies/Microelectronics[SPI.NANO]Engineering Sciences [physics]/Micro and nanotechnologies/Microelectronics0210 nano-technologyHigh-resolution transmission electron microscopyTitanium
researchProduct

The interdependence of structural and electrical properties in TiO2/TiO/Ti periodic multilayers

2013

International audience; Multilayered structures with 14-50 nm periods composed of titanium and two different titanium oxides, TiO and TiO2, were accurately produced by DC magnetron sputtering using the reactive gas pulsing process. The structure and composition of these periodic TiO2/TiO/Ti stacks were investigated by X-ray diffraction and transmission electronic microscopy techniques. Two crystalline phases, hexagonal close packed Ti and face centred cubic TiO, were identified in the metallic-rich sub-layers, whereas the oxygen-rich ones comprised a mixture of amorphous TiO2 and rutile phase. DC electrical resistivity rho measured for temperatures ranging from 300 to 500 K exhibited a meta…

010302 applied physicsMaterials sciencePolymers and PlasticsMetals and AlloysAnalytical chemistrychemistry.chemical_elementNanotechnology02 engineering and technologySputter deposition021001 nanoscience & nanotechnology01 natural sciencesElectronic Optical and Magnetic MaterialsAmorphous solidchemistryElectrical resistivity and conductivityHall effectRutile0103 physical sciencesCeramics and Composites[ SPI.NANO ] Engineering Sciences [physics]/Micro and nanotechnologies/Microelectronics[SPI.NANO]Engineering Sciences [physics]/Micro and nanotechnologies/Microelectronics0210 nano-technologyHigh-resolution transmission electron microscopyTemperature coefficientTitanium
researchProduct

Influence of flash annealing on structure and electrical properties of multilayered TiO2/TiO/Ti thin films

2013

Influence of flash annealing on structure and electrical properties of multilayered TiO2/TiO/Ti thin films

[SPI.NANO] Engineering Sciences [physics]/Micro and nanotechnologies/Microelectronics
researchProduct