E-beam induced damage in SiO2–Ge crystalline α-quartz, comparison with silica glass

2005

Electron beam induced transformation in crystalline α-quartz doped with germanium was studied by mean of cathodoluminescence and of phase shift interferometric microscope. E-beams with low current (below 50 nA), defocused (diameter of spot about 40 μm) and with acceleration energy of 15 kV produce swelling of the irradiated volume about 100 nm above the non-irradiated surface. The luminescence of the self-trapped near germanium exciton (GeSTE) is observed mainly. No luminescence of the germanium related oxygen deficient center with bands at 290 and at 395 nm, usual for Ge-doped silica glass (GeODC), was observed. Defocused e-beam with higher current (about 200 nA), the same energy and simil…