Miniature MOEMS hyperspectral imager with versatile analysis tools
The Fabry-Perot interferometers (FPI) are essential components of many hyperspectral imagers (HSI). While the Piezo-FPI (PFPI) are still very relevant in low volume, high performance applications, the tunable MOEMS FPI (MFPI) technology enables volume-scalable manufacturing, thus having potential to be a major game changer with the advantages of low costs and miniaturization. However, before a FPI can be utilized, it must be integrated with matching optical assembly, driving electronics and imaging sensor. Most importantly, the whole HSI system must be calibrated to account for wide variety of unwanted physical and environmental effects, that significantly influence quality of hyperspectral…