The influence of Cr and Ni doping on the microstructure of oxygen containing diamond-like carbon films
Abstract Non-hydrogenated diamond-like carbon (DLC) films doped with metals and oxygen were deposited by direct current magnetron sputtering. The influence of chromium and nickel on the surface morphology, elemental composition, bonding structure, adhesion force, optical transmittance and nanohardness of the films was characterized by atomic force microscopy (AFM), energy dispersive X-ray spectroscopy (EDX), multi-wavelength Raman spectroscopy, UV–VIS–NIR spectrophotometry and nanoindenter. The surface roughness was reduced with the addition of Cr (7.4 at. %) or Ni (8.9 at. %) into DLC films. The EDX measurements indicated that the addition of Cr increased the oxygen content by ~37%, while …
Synthesis of nanostructured amorphous carbon-copper composite films by plasma-enhanced chemical vapour deposition
Abstract Nanostructured amorphous carbon-copper composite films were formed by plasma-enhanced chemical vapour deposition. The formation was done on copper-silicon substrates at 25 °C, 300 °C, 520 °C, and 700 °C temperatures using an acetylene gas at 40–70 Pa pressure. The heating of the Cu Si substrate induced formation of Cu nanospheres with 50–500 nm size depending on the substrate temperature. The microstructure and composition of nanostructured carbon-copper composite films were investigated. The SEM views showed formation of amorphous carbon films with the randomly distributed nanostructures. The oxygen concentration in the composite films decreased with the increased heating temperat…