Laser direct writing of gold conductors from metallorganic inks

1993

Laser deposition of gold lines from spin-on metallorganic (MO) precursors has been studied. A readily available and relatively low-cost commercial MO ink has been used to write gold interconnects on different substrates. The physical properties of the ink, its laser-firing process on oxidised silicon substrates and its electrical characterisation are presented here, together with the experimental procedure needed for obtaining low-resistivity deposits.