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RESEARCH PRODUCT
Laser direct writing of gold conductors from metallorganic inks
C. ArnoneJ. NotaroG. B. Scelsisubject
Materials scienceInkwellSiliconGeneral Chemical EngineeringAnalytical chemistrychemistry.chemical_elementNanotechnologyLaser direct writingLaserElectronic Optical and Magnetic Materialslaw.inventionchemistrylawElectrical resistivity and conductivityElectrical conductorLaser processingDeposition (law)description
Laser deposition of gold lines from spin-on metallorganic (MO) precursors has been studied. A readily available and relatively low-cost commercial MO ink has been used to write gold interconnects on different substrates. The physical properties of the ink, its laser-firing process on oxidised silicon substrates and its electrical characterisation are presented here, together with the experimental procedure needed for obtaining low-resistivity deposits.
| year | journal | country | edition | language |
|---|---|---|---|---|
| 1993-02-01 | Advanced Materials for Optics and Electronics |