0000000000181074
AUTHOR
C. Arnone
Fabrication of Electrical Contacts on Pyramid-Shaped NTD-Ge Microcalorimeters Using Free-Standing Shadow Masks
In our effort to fabricate arrays of germanium microcalorimeters for X-ray detection, a truncated square-based pyramid shape has been identified as a suitable geometry for the sensors. It allows to obtain a uniform current spreading across each sensor, and represents a good compromise between having a large support area for the radiation absorber and for maintaining an overall small bolometer volume. This three-dimensional geometry, however, does not allow to create the electrical contacts for the sensors using a regular photoresist-based lift-off metallization process. In this paper we show how to deposit metal contacts on the lateral faces of the pyramidal sensors by metal evaporation thr…
Fabrication of Diffractive Optics: Surface Reliefs and Artificial Dielectrics
After a period of fundamental theoretical research, the field of diffractive optics is now reaching a time of assessment, when we can define the useful limits of each design procedure. Selecting a suitable procedure derives from a compromise between several factors, including design time, desired optical efficiency, and precision. A major consideration in finding such a compromise has been, and still is today, the availability of technologies which can realize the design by generating the diffracting structure with assigned tolerances.
Chalcogenide thin films for direct resistors fabrication and trimming
Abstract The fabrication of thin film resistors based on Ge–Sb–Te chalcogenide alloys is proposed. By exploiting the phase change properties of the deposited film, a laser beam is used for inducing a transition from high to low resistivity along selected paths. Conductivity changes as high as four orders of magnitude can be routinely achieved. This candidates the technique for maskless fabrication of compact precision resistors for a variety of applications.
Laser direct writing of gold conductors from metallorganic inks
Laser deposition of gold lines from spin-on metallorganic (MO) precursors has been studied. A readily available and relatively low-cost commercial MO ink has been used to write gold interconnects on different substrates. The physical properties of the ink, its laser-firing process on oxidised silicon substrates and its electrical characterisation are presented here, together with the experimental procedure needed for obtaining low-resistivity deposits.
Planar Array Technology for the Fabrication of Germanium X-Ray Microcalorimeters
Several technologies are presently competing for measuring the temperature increase in cryogenic micro-calorimeters used as high resolution energy-dispersive X-ray detectors. Doped germanium, whose resistivity depends on temperature, is a promising material for this purpose, because of its comparatively low specific heat and the possibility of making wafers with high doping uniformity by neutron transmutation. Presently, Ge-based microcalorimeters are still micro-machined and manually assembled. Here we present a planar approach to the fabrication of 2-D arrays of microcalorimeters and show the preliminary technological results.
Fabrication and Characterization of Polymeric Optical Waveguides Using Standard Silicon Processing Technology
We report the fabrication and characterization of a rib polymeric waveguide having a thick layer of oxidized porous silicon as an innovative solution for the lower cladding. The waveguide was fabricated using standard silicon substrates and Si-based technology. The multimodal guiding structure has a polymethylmetacrylate (PMMA) core and the innovative lower cladding was obtained by thermal oxidation of a porous silicon layer. The waveguide does not have the upper cladding. Propagation loss measurements were performed at 1.48 /spl mu/m using the cut-back method. We obtained propagation loss of about 1.7 dB/cm, confirming the possibility to use the porous silicon oxide as the lower cladding l…
Laser Beam Lithography For 3-D Surface Patterning
A low power laser processing unit, for microlithographic applications on non-planar surfaces, is described. By combining proper laser beam handling, micropositioning, software control and surface coating techniques, a 5-axis robotic system for laser writing has been set up. Light from a He-Cd laser source is fiber-delivered to a writing head, which moves around a resist coated solid object. After exposure, traditional wet processing can be applied. The unit is capable of patterning metal films deposited on samples up to a size of 50x50x100 mm, with 5 micrometer spatial resolution. An application in 3-D circuit fabrication is presented.
Resist Coating of Cylindrical Samples for 3‐D Lithography
A quantitative investigation of a dipping technique for depositing a thin layer of resist on circularly symmetrical objects is presented. The results obtained are valuable for preparing three-dimensional (3-D) surfaces suited for spatial microlithographic processes in the 1 to 10 μm linewidth range. © 1995, MCB UP Limited
High-energy X-ray diffraction and topography investigation of CdZnTe
High-energy transmission x-ray diffraction techniques have been applied to investigate the crystal quality of CdZnTe (CZT). CdZnTe has shown excellent performance in hard x-ray and gamma detection; unfortunately, bulk nonuniformities still limit spectroscopic properties of CZT detectors. Collimated high-energy x-rays, produced by a superconducting wiggler at the National Synchrotron Light Source’s X17B1 beamline, allow for a nondestructive characterization of thick CZT samples (2–3 mm). In order to have complete information about the defect distribution and strains in the crystals, two series of experiments have been performed. First, a monochromatic 67 keV x-ray beam with the size of 300×3…
Blue Emitting Organic Light Emitting Diodes
Organic light emitting diodes (OLEDs) [1] can be fabricated on a range of materials such as glass, silicon or flexible plastic substrates. This can be exploited for the realization of integrated OLED-based fluorescence chemical sensors [2] and microfluidic systems [3] for application in areas such as biotechnology, life sciences, pharmaceuticals, public health and defense. These devices hold promises to be cost effective, ultra-compact (including the possibility to be fabricated into large bidimensional arrays), and capable to handle smaller sample volumes in order to achieve high throughput. Blue light is advantageous because it is strongly absorbed by most sensing molecules attached to bi…
Electroplated Indium Bumps as Thermal and Electrical Connections of NTD-Ge Sensors for the Fabrication of Microcalorimeter Arrays
We are developing a method to build arrays of Ge-based microcalorimeters for soft X-rays detection using micro-photolithographic techniques. A key element of the process is the electrical and thermal connection between the germanium sensors and the interconnection electrical tracks, that lay on a substrate acting as mechanical support and thermal sink. The geometry of the sensors, that have a square base truncated pyramid shape, makes feasible a connection through indium soldering. We describe a technique, based on microlithography and electroplating, adopted to grow indium bumps of a few tens of square microns of area and several microns high on top of the contact pads patterned on the sub…
Planar Technology for NDT-Ge X-Ray Microcalorimeters: Absorber Fabrication
We have investigated the electroplating process to deposit thick uniform films of tin on a Ge wafer coated with Spin‐On Glass, in order to fabricate the absorbers for Ge microcalorimeter arrays. Here we discuss some technological details and propose two alternative metal bilayer to be used as seed for the electroplating.
A fully planar approach to the construction of X-Ray microcalorimeters with doped Germanium sensors
We have investigated a fully planar technology for the development of arrays of X-ray microcalorimeters with doped germanium thermal sensor. We describe the proposed approach and show promising results obtained with the deep etching of germanium, the most critical step of the whole process.
The laser-plotter: A versatile lithographic tool for integrated optics and microelectronics
Abstract The apparatus described here represents a low cost approach to artwork generation for integrated optics and microelectronics, in the resolution range around 2 μm. Its main characteristics are given below, together with some examples of the kind of patterns it can generate.
Investigation on Metal–Oxide Graphene Field-Effect Transistors With Clamped Geometries
In this work, we report on the design, fabrication and characterization of Metal-Oxide Graphene Field-effect Transistors (MOGFETs) exploiting novel clamped gate geometries aimed at enhancing the device transconductance. The fabricated devices employ clamped metal contacts also for source and drain, as well as an optimized graphene meandered pattern for source contacting, in order to reduce parasitic resistance. Our experimental results demonstrate that MOGFETs with the proposed structure show improved high frequency performance, in terms of maximum available gain and transition frequency values, as a consequence of the higher equivalent transconductance obtained.
Material quality characterization of CdZnTe substrates for HgCdTe epitaxy
Cd1−xZnxTe (CZT) substrates were studied to investigate their bulk and surface properties. Imperfections in CZT substrates affect the quality of Hg1−xCdxTe (MCT) epilayers deposited on them and play a role in limiting the performance of infrared (IR) focal plane arrays. CZT wafers were studied to investigate their bulk and surface properties. Transmission and surface x-ray diffraction techniques, utilizing both a conventional closed-tube x-ray source as well as a synchrotron radiation source, and IR transmission micro-spectroscopy, were used for bulk and surface investigation. Synchrotron radiation offers the capability to combine good spatial resolution and shorter exposure times than conv…
Optimization of fluorescence enhancement for silicon-based microarrays
An optical technique for the enhancement of fluorescence detection sensitivity on planar samples is presented. Such a technique is based on the simultaneous optimization of excitation and light collection by properly combining interference and reflectance from the sample holder. Comparative tests have been performed in microarray applications, by evaluating the proposed solution against commercial glass-based devices, using popular labeling dyes, such as Cy3 and Cy5. The proposed technique is implemented on a substrate built with standard silicon technology and is therefore well suited for integrated micro total analysis systems (microTAS) applications.
Donor/Acceptor Heterojunction Organic Solar Cells
The operation and the design of organic solar cells with donor/acceptor heterojunction structure and exciton blocking layer is outlined and results of their initial development and assessment are reported. Under halogen lamp illumination with 100 mW/cm2 incident optical power density, the devices exhibits an open circuit voltage VOC = 0.45 V, a short circuit current density JSC between 2 and 2.5 mA/cm2 with a fill factor FF &asymp
Multilevel pattern generation by GaN laser lithography: an application to beam shaper fabrication
The new GaN lasers represent a unique combination of compactness, reliability, energy efficiency, and short wavelength. With respect to the previous state of the art in direct laser write lithography, based on gas lasers, this is resulting in a breakthrough, and is opening the way to real desktop micropatterning. The field of diffractive optics can immediately benefit by the availability of a new breed of pattern generators, based on such sources, mainly for fast turnaround device development. This paper presents the technical advantages involved in the use of 405 nm GaN lasers for one-step multilevel patterning. Beam modulation, exposure control and overall process strategy are discussed. …
Flexible Laser Tracing Systems for Defining Thin Film Hybrid Geometries
A recent programme of technical collaboration between Alelco, DIE of Palermo and CRES of Monreale has led to the development and operative confirmation of a technique for delineating conductive microgeometries on various types of Substrates. This technique, using a flexible System of laser microlithography on planar (2-D) or three-dimensional (3-D) surfaces, has led to the development of several types of thin film components for use at both low and high frequencies. © 1994, MCB UP Limited
Fabrication and characterization of tuned Gaussian mirrors for the visible and the near infrared
A thin-film technique has been developed for vacuum fabrication of mirrors with Gaussian reflectivity profiles. Samples with diameters from 2 to 8 mm and assigned maximum reflectivities for visible or near-IR wavelengths have been made and their optical properties evaluated. By properly choosing both the geometry of the evaporation source and the masking system, one can obtain quasi-Gaussian or super-Gaussian reflectivity profiles.
Light-Induced Sublimation of Cadmium Sulphide
It has recently been shown that single crystal CdS, illuminated by light whose photon energy exceeds the bandgap, can eject particles from its surface while the temperature is well below the value required for vacuum sublimation. This phenomenon has obvious applications to the fabrication of surface structures as well as to the production of thin films that can show good CdS stoichiometry. This work will present several data on the morphology of the etched surface and its dependance on crystal orientation; results of an analysis of the recondensed thin film phase from the ejected material will also be shown. Emphasis will be devoted to examples of high resolution surface structures fabricat…
Technologies for the fabrication of cylindrical fine line devices
Abstract A microlithographic process suited for metal patterning on cylindrical substrates has been developed. This includes all steps from metal coating to final etching, with resolution in the 5 μm range.
Graded reflectivity micromirror arrays
A technique for fabricating arrays of graded reflectivity micromirrors with diameters as small as 25 microm is reported. It is based on laser-induced physical vapor deposition through microholes on a thin free-standing noncontact mask, and it is suitable for applications in micro-optics and solid-state laser technology.
Propagation of three thymus species by stem cuttings
Many herbs native to the Mediterranean region are grown for ornamental purposes and represent an important segment of the bedding plant industry. Although the majority of Thymus species are used as officinal plants, some of them are also used as ornamental bedding plants to provide aesthetic enhancement of public and private garden beds, porches, patios, balconies. The aim of this research was to study the vegetative propagation of T. capitatus, T. serpyllum and T. vulgaris. To verify the rooting response to exogenous application of auxin, softwood cuttings were either treated with a 500 ppm 1H-indol-3-butyric acid (IBA) solution, or not treated (control). Propagation was performed in an un…
Copper patterning on dielectrics by laser writing in liquid solution
A technique suitable for laser induced deposition of copper on LiNbO 3 and glass is presented. Deposition is achieved from Cu salt solution mixed with glycerol, after coating the surface with a very thin metal film. High resolution and low electrical resistivity can be achieved, using laser power levels in the 20-mW range. The technique can be used for electrode and interconnect fabrication in integrated optical devices, as well as mask repair or microelectronics applications.
Study of Photo-Induced Thin Film Growth on Cds Substrates.*
ABSTRACTPhoto-induced growth of ZnS on CdS has been studied using amorphous (thin film) and single-crystal substrates. The effect has been found to occur for light of wavelength shorter than the CdS absorption edge; a maximum light-induced thickness enhancement of 700 Å has been obtained for the ZnS film, with a growth rate of 2000 Å/min. The lightinduced growth, with its observed “memory” of several minutes is consistent with photo-desorption of an adlayer.