6533b85bfe1ef96bd12ba155
RESEARCH PRODUCT
Flexible Laser Tracing Systems for Defining Thin Film Hybrid Geometries
M. GrecoC. GiaconiaCalogero PaceC. Arnonesubject
Materials sciencebusiness.industryTracingLaser writing Thin FilmCondensed Matter PhysicsLaserSettore ING-INF/01 - ElettronicaAtomic and Molecular Physics and OpticsDie (integrated circuit)Surfaces Coatings and FilmsElectronic Optical and Magnetic Materialslaw.inventionPlanarOpticslawOptoelectronicsElectrical and Electronic EngineeringThin filmbusinessElectrical conductordescription
A recent programme of technical collaboration between Alelco, DIE of Palermo and CRES of Monreale has led to the development and operative confirmation of a technique for delineating conductive microgeometries on various types of Substrates. This technique, using a flexible System of laser microlithography on planar (2-D) or three-dimensional (3-D) surfaces, has led to the development of several types of thin film components for use at both low and high frequencies. © 1994, MCB UP Limited
| year | journal | country | edition | language |
|---|---|---|---|---|
| 1994-01-01 | Microelectronics International |