6533b7ddfe1ef96bd12740ce
RESEARCH PRODUCT
Planar Array Technology for the Fabrication of Germanium X-Ray Microcalorimeters
Marco BarberaSalvo VariscoUgo Lo CiceroC. ArnoneAlfonso ColluraGiuseppe Lullosubject
Materials scienceFabricationSiliconPhysics::Instrumentation and Detectorsbusiness.industryPlanar arrayDopingX-ray detectorchemistry.chemical_elementGermaniumCryogenicsSettore ING-INF/01 - ElettronicaX-ray detectors microcalorimeter planar technologychemistryOptoelectronicsWaferbusinessdescription
Several technologies are presently competing for measuring the temperature increase in cryogenic micro-calorimeters used as high resolution energy-dispersive X-ray detectors. Doped germanium, whose resistivity depends on temperature, is a promising material for this purpose, because of its comparatively low specific heat and the possibility of making wafers with high doping uniformity by neutron transmutation. Presently, Ge-based microcalorimeters are still micro-machined and manually assembled. Here we present a planar approach to the fabrication of 2-D arrays of microcalorimeters and show the preliminary technological results.
| year | journal | country | edition | language |
|---|---|---|---|---|
| 2008-10-01 |