6533b82efe1ef96bd1293c6a
RESEARCH PRODUCT
A fully planar approach to the construction of X-Ray microcalorimeters with doped Germanium sensors
C. ArnoneEmanuele PerinatiJeffrey W. BeemanG. ChianettaMarco BarberaEric H. SilverAlfonso ColluraGiuseppe Lullosubject
Thermal sensorsMaterials sciencebusiness.industryThermistorDetectorDopingX-raychemistry.chemical_elementGermaniumCondensed Matter PhysicsAtomic and Molecular Physics and OpticsPlanarX-ray detectors microcalorimeter planar technologychemistryEtching (microfabrication)OptoelectronicsGeneral Materials Sciencebusinessdescription
We have investigated a fully planar technology for the development of arrays of X-ray microcalorimeters with doped germanium thermal sensor. We describe the proposed approach and show promising results obtained with the deep etching of germanium, the most critical step of the whole process.
| year | journal | country | edition | language |
|---|---|---|---|---|
| 2008-01-25 |