Author: G. Chianetta

0000000000733413

AUTHOR

G. Chianetta

showing 1 related works from this author

A fully planar approach to the construction of X-Ray microcalorimeters with doped Germanium sensors

2008

We have investigated a fully planar technology for the development of arrays of X-ray microcalorimeters with doped germanium thermal sensor. We describe the proposed approach and show promising results obtained with the deep etching of germanium, the most critical step of the whole process.

Thermal sensorsMaterials sciencebusiness.industryThermistorDetectorDopingX-raychemistry.chemical_elementGermaniumCondensed Matter PhysicsAtomic and Molecular Physics and OpticsPlanarX-ray detectors microcalorimeter planar technologychemistryEtching (microfabrication)OptoelectronicsGeneral Materials Sciencebusiness

researchProduct

PEPhysical Sciences and Engineering
- PE2Fundamental Constituents of Matter
  - PE2_1Theory of fundamental interactions
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  - PE2_7Nuclear and particle astrophysics
  - PE2_9 Electromagnetism
  - PE2_10Atomic, molecular physics
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- PE1Mathematics
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LSLife Sciences
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SHSocial Sciences and Humanities
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