6533b824fe1ef96bd1280a26

RESEARCH PRODUCT

Laser Beam Lithography For 3-D Surface Patterning

C GiaconiaC. ArnoneS BonuraM. GrecoCalogero Pace

subject

Materials sciencebusiness.industryExtreme ultraviolet lithographyLaserLaser writing 3-D Laser LithographySettore ING-INF/01 - Elettronicalaw.inventionSurface coatingResistlawMultiple patterningOptoelectronicsPhotolithographybusinessNext-generation lithographyMaskless lithography

description

A low power laser processing unit, for microlithographic applications on non-planar surfaces, is described. By combining proper laser beam handling, micropositioning, software control and surface coating techniques, a 5-axis robotic system for laser writing has been set up. Light from a He-Cd laser source is fiber-delivered to a writing head, which moves around a resist coated solid object. After exposure, traditional wet processing can be applied. The unit is capable of patterning metal films deposited on samples up to a size of 50x50x100 mm, with 5 micrometer spatial resolution. An application in 3-D circuit fabrication is presented.

yearjournalcountryeditionlanguage
1993-01-01
10.1007/978-94-011-1990-0_20http://hdl.handle.net/10447/425923