Planar Technology for NDT-Ge X-Ray Microcalorimeters: Absorber Fabrication

6533b82dfe1ef96bd1290a5a

RESEARCH PRODUCT

Planar Technology for NDT-Ge X-Ray Microcalorimeters: Absorber Fabrication

U. Lo Cicero C. Arnone M. Barbera A. Collura G. Lullo E. Perinati S. Varisco Betty Young Blas Cabrera Aaron Miller

subject

Materials science Fabrication X-ray detectors planar technology business.industry Bilayer Analytical chemistry chemistry.chemical_element Settore ING-INF/01 - Elettronica Ion implantation Planar Settore FIS/05 - Astronomia E Astrofisica chemistry Nondestructive testing Optoelectronics Wafer Tin business Electroplating

description

We have investigated the electroplating process to deposit thick uniform films of tin on a Ge wafer coated with Spin‐On Glass, in order to fabricate the absorbers for Ge microcalorimeter arrays. Here we discuss some technological details and propose two alternative metal bilayer to be used as seed for the electroplating.

year	journal	country	edition	language
2009-01-01

10.1063/1.3292295 http://hdl.handle.net/10447/49096

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