6533b821fe1ef96bd127c3e8

RESEARCH PRODUCT

Fabrication and Characterization of Polymeric Optical Waveguides Using Standard Silicon Processing Technology

C. ArnoneR.l. OliveriSebania LibertinoAntonella SciutoGiuseppe D'arrigo

subject

Thermal oxidationMaterials scienceFabricationSiliconbusiness.industryHybrid silicon laserchemistry.chemical_elementPorous siliconCladding (fiber optics)Waveguide (optics)Optical waveguidesOpticschemistryOptoelectronicsbusinessRefractive indexWaveguidesEthers

description

We report the fabrication and characterization of a rib polymeric waveguide having a thick layer of oxidized porous silicon as an innovative solution for the lower cladding. The waveguide was fabricated using standard silicon substrates and Si-based technology. The multimodal guiding structure has a polymethylmetacrylate (PMMA) core and the innovative lower cladding was obtained by thermal oxidation of a porous silicon layer. The waveguide does not have the upper cladding. Propagation loss measurements were performed at 1.48 /spl mu/m using the cut-back method. We obtained propagation loss of about 1.7 dB/cm, confirming the possibility to use the porous silicon oxide as the lower cladding layer, for low cost waveguide applications.

yearjournalcountryeditionlanguage
2005-07-13
10.1109/wfopc.2005.1462137http://hdl.handle.net/10447/23020